On-Chip Circuit
Modifications
Knight’s Navigation
Tool
Decapsulation
Product
Failure Analysis |
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THE
SERVICE: Product Failure Analysis |
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- Removing dielectric or metal layer to open window for
probing.
- Selective etch of dielectric to allow probing of
multiple metal layer.
- Cross section with sub-micron accuracy for defect
analysis.
FIB cross sectioning speeds defect analysis.
- Sequential slicing and cross-sectioning can be used for
process monitoring.
- TEM sample preparation.
FIB cuts TEM sample preparation time dramatically.
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